JPH0541490Y2 - - Google Patents
Info
- Publication number
- JPH0541490Y2 JPH0541490Y2 JP13426589U JP13426589U JPH0541490Y2 JP H0541490 Y2 JPH0541490 Y2 JP H0541490Y2 JP 13426589 U JP13426589 U JP 13426589U JP 13426589 U JP13426589 U JP 13426589U JP H0541490 Y2 JPH0541490 Y2 JP H0541490Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- support
- hole
- deceleration
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 125000006850 spacer group Chemical group 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13426589U JPH0541490Y2 (en]) | 1989-11-17 | 1989-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13426589U JPH0541490Y2 (en]) | 1989-11-17 | 1989-11-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0371543U JPH0371543U (en]) | 1991-07-19 |
| JPH0541490Y2 true JPH0541490Y2 (en]) | 1993-10-20 |
Family
ID=31681613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13426589U Expired - Lifetime JPH0541490Y2 (en]) | 1989-11-17 | 1989-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0541490Y2 (en]) |
-
1989
- 1989-11-17 JP JP13426589U patent/JPH0541490Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0371543U (en]) | 1991-07-19 |
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